MultiGas_™ FTIR-based analyzer by MKS is capable of ppb to ppm sensitivity for over 10,000 gas species in a variety of gas analyzer applications, such as:

• stack emissions monitoring,
• continuous emissions monitoring (CEM),
• process monitoring,
• formaldehyde emissions monitoring,
• purity monitoring,
• automobile, diesel, and catalyst exhaust monitoring.

FTIR-based gas sensors are used for fault detection, monitoring, control, or endpoint determination.

For example in a vessel a clean endpoint can be detected to lowers cost and increases productivity by accurately identifying the end of the chamber clean step in semiconductor or flat panel deposition chambers.